Related Experiment Video
Updated: Jul 4, 2026
07:14
Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging
Published on: April 11, 2025
Design and fabrication of a micro-optic switch
Wei Li1, Jingqiu Liang, Zhongzhu Liang
1State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine, Mechanics and Physics, Chinese Academy of Sciences, 16 East Nanhu Street, Changchun, JL 130033, China.
Optics Express
|June 12, 2008
Summary
This study presents an electromagnetic micro-optic switch using a polyimide cantilever. Optimized design and fabrication achieved a 1.28 mm balanceable distance, with a 20 ms switching time and 0.73 dB insertion loss.
Area of Science:
- Optoelectronics
- Microelectromechanical Systems (MEMS)
- Materials Science
Background:
- Micro-optic switches are crucial components in optical communication networks.
- Electromagnetic actuation offers a viable method for micro-scale switching applications.
- Polyimide materials provide desirable properties for microfabrication and device performance.
Purpose of the Study:
- To design, simulate, and fabricate a polyimide cantilever micro-optic switch actuated electromagnetically.
- To optimize the electromagnetic actuation parameters for efficient switching.
- To experimentally evaluate the performance of the fabricated micro-optic switch.
Main Methods:
- Finite element method (FEM) for electromagnetic actuation modeling and simulation.
- Thick resist patterning and electroplating for fabricating the electromagnetic actuator.
- Experimental testing to determine switching distance, time, and insertion loss.
Main Results:
- Optimized electromagnetic force parameters for coil and magnet were determined.
- A balanceable distance of 1.28 mm was achieved with a 0.4 A current pulse.
- The fabricated 1x4 micro-optic switch demonstrated a switching time of approximately 20 ms and an insertion loss of about 0.73 dB.
Conclusions:
- The study successfully demonstrated a functional polyimide cantilever micro-optic switch with electromagnetic actuation.
- FEM simulation and experimental results confirm the feasibility and performance of the proposed design.
- The optimized design and fabrication process pave the way for practical micro-optic switching devices.
