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Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
Published on: July 5, 2016
X-ray analysis and mapping by wavelength dispersive X-ray spectroscopy in an electron microscope
Miyoko Tanaka1, Masaki Takeguchi, Kazuo Furuya
1National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan. TANAKA.Miyoko@nims.go.jp
Ultramicroscopy
|July 23, 2008
Summary
This study introduces a compact X-ray spectrometer for thin-film analysis. The system effectively distinguishes boron compounds and maps elemental distributions in multilayer samples.
Area of Science:
- Materials Science
- Analytical Chemistry
- Spectroscopy
Background:
- Accurate characterization of thin films is crucial for advanced materials development.
- Conventional X-ray spectrometers can be bulky and complex, limiting their application in certain microscopy setups.
- There is a need for compact, user-friendly spectrometers for in-situ thin-film analysis.
Purpose of the Study:
- To evaluate a novel compact wavelength dispersive X-ray spectrometer for thin-film analysis.
- To assess the spectrometer's capability in differentiating various boron compounds.
- To demonstrate the system's elemental mapping potential in multilayer structures.
Main Methods:
- Integration of a multi-capillary X-ray lens with a scanning electron microscope.
- Acquisition of B-K X-ray spectra from thin-film boron compounds (B4C, h-BN, B2O3).
- Elemental mapping of W/Si double-layer and SiO2/Si thin-film samples using X-ray spectroscopy.
Main Results:
- Prominent peak shifts and structural differences were observed in B-K spectra of different boron compounds.
- Clear elemental resolution was achieved for a thin W/Si double-layer sample.
- Successful imaging of a thin SiO2 film on a Si substrate using O-K X-rays was demonstrated.
Conclusions:
- The compact wavelength dispersive X-ray spectrometer is effective for thin-film analysis.
- The system provides high sensitivity for differentiating materials and mapping elemental distributions.
- Further investigation into the energy and spatial resolution capabilities is warranted.
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