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SiO2-based nonplanar structures fabricated using femtosecond laser lithography
Hiroaki Nishiyama1, Mizue Mizoshiri, Toshio Kawahara
1Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University, Suita, Osaka, Japan. hiroaki@mapse.eng.osaka-u.ac.jp
Optics Express
|October 30, 2008
Summary
Researchers created hybrid diffractive-refractive microlenses using femtosecond laser lithography and plasma etching. This novel fabrication method successfully shifted the lens focal length by 216 micrometers, matching theoretical predictions.
Area of Science:
- Materials Science
- Optics
- Nanotechnology
Background:
- Microlens fabrication is crucial for miniaturized optical systems.
- Combining diffractive and refractive elements can enhance optical performance.
- Femtosecond laser processing offers high precision for micro-optics.
Purpose of the Study:
- To fabricate novel SiO2-based hybrid diffractive-refractive microlenses.
- To investigate the use of femtosecond laser lithography-assisted micromachining for microlens creation.
- To analyze the focal length shift achieved through this hybridization.
Main Methods:
- Femtosecond laser lithography-assisted micromachining was employed.
- Nonlinear lithography and CHF(3) plasma etching were combined processes.
- High-aspect-ratio resist patterns were formed and transferred to SiO2 lenses.
Main Results:
- Smooth, nonplanar SiO2 structures with micro-Fresnel lens patterns were successfully fabricated.
- The hybrid microlenses exhibited a focal length shift of 216 micrometers.
- Experimental results were consistent with theoretical calculations.
Conclusions:
- Femtosecond laser lithography-assisted micromachining is an effective method for fabricating hybrid diffractive-refractive microlenses.
- The developed technique allows for precise control over microlens surface topography.
- This approach offers a viable route for advanced optical component design.
