Nanodisplacement measurement using spectral shifts in a white-light interferometer

Area of Science:

• Optical Physics
• Metrology
• Interferometry

Background:

• Accurate measurement of nanometer displacements is crucial in various scientific and industrial applications.
• Traditional interferometric methods face limitations in sensitivity and resolution for nanoscale measurements.

Purpose of the Study:

• To develop and demonstrate a novel experimental method for high-sensitivity nanometer displacement measurement.
• To explore the use of spectral peak shifts in interference spectra for enhanced metrology.

Main Methods:

• Utilizing a Michelson interferometer illuminated by a broadband white-light source.
• Analyzing wavelength shifts of spectral peaks around singular phase points in interference spectra.
• Comparing measurements at spectral switch positions with those far from it.

Main Results:

• Observed dramatic changes in spectral characteristics as a function of optical path difference.
• Demonstrated significantly higher sensitivity in displacement measurements near spectral switch points.
• Validated the novel method's capability for precise nanoscale displacement detection.

Conclusions:

• The proposed method offers a novel approach to nanometer displacement measurement with enhanced sensitivity.
• Spectral analysis around singular phase points in interferometry is a promising technique for high-precision metrology.
• This method has potential applications in fields requiring ultra-precise length measurements.