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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

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Catalyst and temperature dependent growth of silicon nitride micro/nanoribbons

Weiyou Yang1, Huatao Wang, Shuzhen Liu

  • 1School of Mechanical Engineering, Ningbo University of Technology, Ningbo 315016, P. R. China.

Journal of Nanoscience and Nanotechnology
|December 4, 2008
PubMed

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