Nonpolarizing guided-mode resonance filter
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Updated: Jun 26, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Xiaoyong Fu1, Kui Yi, Jianda Shao
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China. masfxy@163.com
Abstract:
A normal-incidence nonpolarizing guided-mode resonance filter is designed. There are two waveguide layers and one grating layer in the filter. By adjusting the distance between the two waveguide layers, the same resonance wavelength for both TE and TM polarization can be achieved. An antireflection design method is also used to decrease the sideband reflection of the filter. The results show that the filter has high reflection, more than 99.9% at 500 nm, and the FWHMs of TE- and TM-polarized light are 2.16 and 0.15 nm, respectively.
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