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Updated: Jun 26, 2026

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
1Fachbereich Physik, Universität Duisburg-Essen, 47048, Duisburg, Germany. andreas.wucher@uni-due.de
This study combines molecular time of flight secondary ion mass spectrometry (ToF-SIMS) imaging with ion beam erosion for 3D chemical analysis. We show that this method can assess sputter depth profiling artifacts and achieve near-physical depth resolution limits.
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