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Published on: October 29, 2021
Scaling limitations of laser-fabricated nerve electrode arrays
Christian Henle1, Martin Schuettler, Juan S Ordonez
1Laboratory for Biomedical Microtechnology, Department of Microsystems Engineering, University of Freiburg, Germany. christian.henle@imtek.de
Abstract:
A laser technology for manufacturing implantable electrode arrays, using spin-on polydimethylsiloxane (PDMS) and platinum foil as materials, was investigated in respect to its scaling limitations. The following aspects were analyzed: Minimal width and centre-to-centre distance of platinum tracks, the ability of spin-on PDMS to flow between platinum tracks with very narrow gaps and the electrical insulation properties of thin spin-coated PDMS.
