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Updated: Jan 24, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Off-chip beam steering with a one-dimensional optical phased array on silicon-on-insulator
Karel Van Acoleyen1, Wim Bogaerts, Jana Jágerská
1Photonics Research Group, Ghent University-Interuniversity MicroElectronics Center, Sint-Pietersnieuwstraat 41, B-9000 Ghent, Belgium. karel.vanacoleyen@intec.ugent.be
This study presents an integrated silicon-on-insulator optical phased array for rapid beam steering. It achieves precise control using thermo-optical and wavelength tuning methods for versatile optical applications.
Area of Science:
- Photonics and Optical Engineering
- Integrated Optics
- Semiconductor Devices
Background:
- Optical phased arrays (OPAs) are crucial for applications requiring fast and accurate light beam manipulation.
- Existing OPA technologies face challenges in integration, cost, and performance.
Purpose of the Study:
- To demonstrate a novel, integrated 1D optical phased array on a silicon-on-insulator (SOI) platform.
- To achieve precise, dual-axis beam steering using a combination of thermo-optical and wavelength tuning techniques.
Main Methods:
- Fabrication of a 1D OPA with 16 parallel grating couplers on SOI.
- Thermo-optical beam steering using an integrated titanium electrode.
- Wavelength tuning for beam steering in the orthogonal direction.
Main Results:
- Demonstrated continuous thermo-optical steering of 2.3 degrees.
- Achieved wavelength steering of 14.1 degrees at 1550 nm.
- Integrated approach enables compact and efficient beam steering.
Conclusions:
- The developed SOI optical phased array offers a versatile platform for precise beam steering.
- The hybrid steering mechanism (thermo-optical and wavelength) provides enhanced control and functionality.
- This technology holds promise for advanced optical systems and communication.
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