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Updated: Jun 22, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Low-loss silicide/silicon plasmonic ribbon waveguides for mid- and far-infrared applications
Sang-Yeon Cho1, Richard A Soref
1Klipsch School of Electrical and Computer Engineering, New Mexico State University, Las Cruces, New Mexico 88003-8001, USA. sangycho@nmsu.edu
Abstract:
We report low-loss silicide/silicon plasmonic ribbon waveguides for mid- and far-IR applications. The composite modes in silicide ribbon waveguides offer a low-loss and highly confined mode profile, giving excellent plasmon waveguiding for long-wavelength applications. The calculated propagation loss of the composite long-range surface-plasmon polariton mode at a wavelength of 100 microm is 2.18 dB/cm with a mode height of less than 30 microm. The results presented provide important design guidelines for silicide/Si plasmon waveguides.

