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Nondispersive optical phase shifter array using microelectromechanical systems based gratings.

Guangya Zhou, Fook Siong Chau

    Optics Express
    |June 24, 2009
    PubMed
    Summary
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    We developed a novel microelectromechanical systems (MEMS) phase shifter array. This broadband nondispersive device offers wavelength independence for advanced optical applications.

    Area of Science:

    • Optics and Photonics
    • Microelectromechanical Systems (MEMS)
    • Nanotechnology

    Background:

    • Optical phase shifters are crucial components in various photonic systems.
    • Existing phase shifters often suffer from dispersion, limiting their broadband applicability.
    • Microelectromechanical Systems (MEMS) offer a promising platform for miniaturized and reconfigurable optical devices.

    Purpose of the Study:

    • To present a novel broadband nondispersive optical phase shifter array.
    • To demonstrate the feasibility of a MEMS-based solution for wavelength-independent phase shifting.
    • To explore the potential of this technology in multispectral and optical phased array applications.

    Main Methods:

    • Fabrication of a micro-grating element array using silicon-on-insulator (SOI) micromachining.

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    Last Updated: Jun 22, 2026

    Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator
    08:39

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    Published on: January 28, 2019

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  • Utilizing in-plane translational motion of micro-gratings to induce phase shifts.
  • Experimental validation of the nondispersive phase shifting principle with a prototype device.

    • Main Results:

    • Successful demonstration of a MEMS-based optical phase shifter array.
    • The phase shift was confirmed to be independent of the incident light's wavelength.
    • The device exhibited broadband, nondispersive phase shifting capabilities.

    Conclusions:

    • A broadband nondispersive optical phase shifter array based on MEMS technology has been successfully developed.
    • The device's operation principle, relying on grating displacement to period ratio, ensures wavelength independence.
    • This MEMS phase shifter array holds significant potential for multispectral imaging and broadband optical phased arrays.