State feedback control for adjusting the dynamic behavior of a piezoactuated bimorph atomic force microscopy probe

Bilal Orun1, Serkan Necipoglu, Cagatay Basdogan

  • 1College of Engineering, Koc University, Istanbul 34450, Turkey.

Summary

We optimized atomic force microscopy (AFM) probe dynamics using state feedback control. This method simultaneously adjusts probe quality factor and resonance frequency, reducing scan errors in tapping mode.