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Spectroscopic ellipsometry applied to phase transitions in solids: possibilities and limitations
Alexandr Dejneka1, Ilze Aulika, Vladimir Trepakov
1Institute of Physics, Academy of Science, Na Slovance 2, 182 21 Prague 8, Czech Republic. dejneka@fzu.cz
Optics Express
|August 6, 2009
Summary
Spectroscopic ellipsometry effectively detects phase transitions in oxide films and crystals. This technique analyzes optical properties like band gap energy and refractive index, even for surface transitions and defects.
Area of Science:
- Materials Science
- Solid State Physics
- Optical Spectroscopy
Background:
- Phase transitions in oxide thin films and crystals are crucial for device performance.
- Understanding these transitions requires sensitive in situ characterization methods.
- Traditional methods may lack the resolution for subtle surface phenomena.
Purpose of the Study:
- To explore the application of in situ spectroscopic ellipsometry for investigating phase transitions.
- To evaluate the utility of various ellipsometric parameters in detecting phase transitions.
- To demonstrate the technique's sensitivity to surface phase transitions and defects.
Main Methods:
- In situ spectroscopic ellipsometry measurements were performed on oxide thin films and crystals.
- Analysis involved key ellipsometric angles (psi and Delta).
- Calculated parameters included band gap energy (Eg), refractive index (n), and surface roughness.
Main Results:
- Spectroscopic ellipsometry successfully identified phase transitions in the studied materials.
- Changes in Eg, n, and surface roughness correlated with phase transition events.
- The method proved effective for detecting surface phase transitions.
- High sensitivity to surface defects was observed.
Conclusions:
- In situ spectroscopic ellipsometry is a powerful tool for phase transition studies in oxides.
- Analysis of multiple optical parameters enhances transition detection capabilities.
- The technique offers valuable insights into surface phenomena and material quality.
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