Impedance spectroscopy and optical analysis of single biological cells and organisms in microsystems

A novel microfabricated flow cytometer for simultaneous impedance and optical measurement of single cells and particles is described in this chapter. We discuss the sensitivity of the system with regard to the impedance sensor and describe the optical setup. The relevant parameters related to the experimental setup and sample preparation are discussed. The use of dielectrophoretic forces for particle manipulation is presented as a simple enabling technology, which allows the manipulation of particles within microfluidic devices. The fabrication processes required to produce the impedance sensor chips are described with relevance to the chip design and features. Finally, the system is used to discriminate between different marine algae populations.