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Updated: Jun 20, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
10:25

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

Miniaturization in Asia Pacific 2009

Bingcheng Lin, Jianhua Qin

    Electrophoresis
    |September 19, 2009
    PubMed
    Summary

    No abstract available in PubMed .

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