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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Charge contrast imaging of gibbsite using the variable pressure SEM.

Kevin Robertson1, Raynald Gauvin, James Finch

  • 1Department of Mining, Metals and Materials Engineering, McGill University, Montréal, Québec H3A 2B2, Canada.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
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Summary

This study presents methods for optimizing charge contrast imaging (CCI) in variable pressure scanning electron microscopy (VP-SEM). Optimal conditions for CCI are achieved when specimen current is balanced between 2.5 nA and 3.5 nA.

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Area of Science:

  • Materials Science
  • Microscopy

Background:

  • Variable Pressure Scanning Electron Microscopy (VP-SEM) enables imaging of non-conductive samples without coating.
  • Charge contrast imaging (CCI) in VP-SEM arises from incomplete charge neutralization, but its mechanism is not fully understood.
  • Optimizing CCI is crucial for understanding charging phenomena in VP-SEM.

Purpose of the Study:

  • To provide user-friendly methods for achieving optimal charge contrast levels in VP-SEM.
  • To identify the optimal specimen current range for effective CCI.
  • To elucidate the relationship between operating parameters and CCI.

Main Methods:

  • Investigated charge contrast imaging (CCI) in a Hitachi S3000N VP-SEM.
  • Varied parameters including pressure, working distance, bias, scan rate, and beam current.
  • Monitored specimen current as an indicator of charge compensation.

Main Results:

  • Charge contrast imaging (CCI) is optimally obtained when specimen current is maintained between 2.5 nA and 3.5 nA.
  • This optimal specimen current range signifies a balance between secondary electron emission and ion flux.
  • Controlling VP-SEM parameters allows for precise adjustment of specimen current to achieve optimal CCI.

Conclusions:

  • User-friendly methods for optimizing CCI in VP-SEM have been established.
  • The specimen current range of 2.5–3.5 nA is identified as the key condition for optimal CCI.
  • Understanding and controlling specimen current is essential for effective charge contrast imaging in VP-SEM.