One-dimensional alignment of SBA-15 films in microtrenches

Hirofumi Daiguji1, Naoya Tatsumi, Sho Kataoka

  • 1Institute of Environmental Studies, Graduate School of Frontier Sciences, The University of Tokyo 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8563, Japan. daiguji@k.u-tokyo.ac.jp

Summary

This study synthesized SBA-15 thin films in microtrenches, revealing pore alignment influenced by capillary forces and a low-temperature oxide (LTO) layer. The LTO layer altered pore orientation in the film