Simultaneous readout of multiple microcantilever arrays with phase-shifting interferometric microscopy

Area of Science:

• Analytical Chemistry
• Materials Science
• Nanotechnology

Background:

• Microcantilever sensors are widely used for chemical and biological detection.
• Existing readout methods often require precise alignment and have limited throughput.
• There is a need for a robust, high-throughput system for simultaneous cantilever monitoring.

Purpose of the Study:

• To develop and validate a complete system for simultaneous monitoring of multiple cantilever sensors.
• To implement phase-shifting interferometric microscopy (PSIM) for cantilever readout.
• To design a versatile sample cell for efficient sensor array handling.

Main Methods:

• Utilized phase-shifting interferometric microscopy (PSIM) for non-contact, alignment-independent cantilever deflection readout.
• Developed a novel sample cell capable of holding multiple cantilever-array chips.
• Enabled rapid, reproducible sensor-chip replacement and individual/common addressing of chips.
• Demonstrated system functionality with simultaneous monitoring of eight cantilevers across four sensor chips.

Main Results:

• Successfully developed and tested a system for simultaneous monitoring of multiple cantilever sensors.
• PSIM readout proved effective for both gas- and liquid-phase applications.
• The developed sample cell facilitated low-volume, high-throughput analysis.
• The system demonstrated reliable performance in monitoring multiple sensor arrays.

Conclusions:

• The developed microcantilever sensor system offers a powerful platform for simultaneous, high-throughput analysis.
• PSIM provides a robust and efficient readout method for cantilever-based sensing.
• The integrated system is suitable for diverse gas and liquid sensing applications, advancing sensor technology.