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Updated: Jun 19, 2026

Fabrication and Testing of Photonic Thermometers
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All-silicon Fabry-Perot modulator based on the thermo-optic effect.

G Cocorullo, M Iodice, I Rendina

    Optics Letters
    |October 16, 2009
    PubMed
    Summary
    This summary is machine-generated.

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    A novel silicon Fabry-Perot optical modulator utilizes the thermo-optic effect for high intensity modulation. This electrically driven device, compatible with standard microelectronic technology, promises high-frequency operation for integrated photonic circuits.

    Area of Science:

    • Photonics
    • Microelectronic Engineering
    • Materials Science

    Background:

    • Fabry-Perot optical modulators are crucial components in photonic integrated circuits.
    • Thermo-optic modulators offer potential for integration but often suffer from low operating frequencies.

    Purpose of the Study:

    • To report the operation of a silicon Fabry-Perot optical modulator at 1.5 microm wavelength.
    • To demonstrate the integration potential of thermo-optic modulators with standard silicon microelectronic technology.
    • To investigate and predict the operational frequency of optimized integrated versions.

    Main Methods:

    • Fabrication of an electrically driven silicon Fabry-Perot optical modulator using standard silicon microelectronic technology.
    • Utilizing the thermo-optic effect for intensity modulation.

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    Fabrication and Testing of Photonic Thermometers
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  • Performing accurate three-dimensional thermal analysis to develop a numerical code for design optimization.

    • Main Results:

    • Achieved up to 55% intensity modulation depth.
    • Demonstrated compatibility with standard silicon microelectronic fabrication processes, enabling integration with electronic circuits.
    • Numerical simulations predict operation frequencies in the hundreds of kilohertz range.

    Conclusions:

    • The developed silicon Fabry-Perot optical modulator is a viable component for integrated photonic systems.
    • The thermo-optic effect can be effectively employed in silicon-based modulators for high-frequency applications.
    • The numerical design code facilitates the optimization of integrated optical modulators for enhanced performance.