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Updated: Jun 19, 2026

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Source characterization for x-ray proximity lithography.

K Gabel, M Richardson, M Kado

    Optics Letters
    |October 27, 2009
    PubMed
    Summary
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    Researchers optimized laser-produced plasma x-ray spectra for proximity lithography. Copper and Barium emitters showed the highest conversion efficiency, with minimal debris observed from Gold and Tungsten targets.

    Area of Science:

    • Plasma Physics
    • Materials Science
    • Nanotechnology

    Background:

    • Laser-produced plasmas are a source of X-rays for various applications.
    • Optimizing X-ray spectra is crucial for efficient lithography.
    • Understanding debris generation is important for target material selection.

    Purpose of the Study:

    • To calibrate X-ray spectra from laser-produced plasmas.
    • To optimize conversion efficiency for proximity lithography at 1 nm.
    • To measure debris deposition from different target materials.

    Main Methods:

    • Recorded calibrated X-ray spectra from materials with atomic numbers 12 (Mg) to 83 (Bi).
    • Measured conversion efficiency in a 0.5-nm band centered at 1 nm.
    • Assessed debris by measuring deposited layer thickness on witness plates.

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    Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies
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    Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies

    Published on: June 12, 2018

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    Last Updated: Jun 19, 2026

    Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
    10:39

    Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

    Published on: October 11, 2016

    Fabrication of Spatially Confined Complex Oxides
    08:45

    Fabrication of Spatially Confined Complex Oxides

    Published on: July 1, 2013

    Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies
    09:45

    Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies

    Published on: June 12, 2018

    Main Results:

    • Highest conversion efficiency (~0.8%) achieved with L-shell (Cu) and M-shell (Ba) emitters.
    • Debris layers of 30-nm thickness were deposited from Au and W targets in a single shot.
    • X-ray spectra were calibrated for materials across a wide atomic number range.

    Conclusions:

    • L-shell and M-shell emitters are optimal for 1 nm X-ray generation in laser-produced plasmas.
    • Gold and Tungsten targets produce significant debris, impacting lithography processes.
    • Calibrated spectral data provides a basis for further optimization of X-ray sources for lithography.