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Updated: Jun 18, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Optical, structural and electrical investigations of TiO2/multi-walled carbon nanotube composites
M R S Castro1, P W Oliveira, H K Schmidt
1INM-Leibniz Institut für Neue Materialien GmbH, Campus D2 2, D-66123, Saarbrücken, Germany.
Abstract:
Nanocomposites of TiO2 and multi-walled carbon nanotubes (MWNTs) were produced by the addition of different concentrations of MWNTs to a TiO2 sol matrix. Conductive coatings were prepared by spin coating the nanocomposite sols on glass substrates and sintering the samples at 300 degrees C for 15 min. No crystalline phase of TiO2 was formed at this temperature. The sheet resistance of the coatings was decreased from some hundreds of Momega/sq to just a few komega/sq by the addition of MWNTs to the TiO2 matrix. Moreover, sintering of the coatings in a reducing atmosphere has lead to a lower sheet resistance than that presented by coatings sintered in air. The lowest resistivity of 2.0 x 10(-1) omega x cm was obtained by coatings prepared with 5.0 mg/ml MWNTs in the composite sol. The optical, structural and electrical properties of the coatings were correlated and demonstrated.

