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Related Experiment Video

Updated: Jun 17, 2026

An Experimental Protocol for Assessing the Performance of New Ultrasound Probes Based on CMUT Technology in Application to Brain Imaging
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CMUT characterization by interferometric and electric measurements.

Hanne Martinussen1, Astrid Aksnes, Erlend Leirset

  • 1Department of Electronics and Telecommunications,, Norwegian University of Science and Technology, Trondheim, Norway. hanne.martinussen@iet.ntnu.no

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|December 31, 2009
PubMed
Summary

This study characterizes Capacitive Micromachined Ultrasonic Transducers (CMUTs) using optical and electrical methods. Results aid in fabricating improved CMUTs, showing stable operation across temperatures and investigating high-frequency vibration modes.

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Area of Science:

  • MEMS technology
  • Ultrasonic transducers
  • Microfabrication

Background:

  • Capacitive Micromachined Ultrasonic Transducers (CMUTs) are crucial for various applications.
  • Characterization of CMUTs is essential for performance optimization.
  • Previous studies have not extensively explored high-frequency vibration modes in CMUTs.

Purpose of the Study:

  • To optically and electrically characterize CMUTs with 5.7 µm radius fabricated via wafer bonding.
  • To investigate the resonance frequency spread, Q-factors, and DC voltage dependency of CMUT membranes.
  • To analyze the behavior of higher harmonic vibration modes at frequencies above 40 MHz.

Main Methods:

  • Optical characterization using a heterodyne interferometer.
  • Electrical characterization using a network analyzer.
  • Numerical comparison of Q-factor measurements from both methods.

Main Results:

  • CMUTs exhibit stable operation with minor resonance frequency shifts (<0.1%) across typical temperature variations.
  • Resonance frequency spread and Q-factors were quantified for CMUT membranes.
  • Higher harmonic vibration modes were observed and analyzed at approximately 60 MHz.

Conclusions:

  • The study provides valuable data for enhancing next-generation CMUT fabrication.
  • CMUTs demonstrate reliable performance under varying temperatures.
  • Novel insights into high-frequency (>40 MHz) CMUT vibration modes were achieved.