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Fabrication of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique
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Toward the ultimate limit of phase change in Ge(2)Sb(2)Te(5)

R E Simpson1, M Krbal, P Fons

  • 1Center for Applied Near-Field Optics Research, National Institute of Applied Industrial Science and Technology, Tsukuba Central4, 1-1-1 Higashi, Tsukuba 305-8562, Japan. robert.simpson@aist.go.jp

Nano Letters
|January 1, 2010
PubMed

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