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On-chip, planar integration of Er doped silicon-rich silicon nitride microdisk with SU-8 waveguide with sub-micron
Jee Soo Chang1, Seok Chan Eom, Gun Yong Sung
1Department of Physics, KAIST 373-1 Guseong-dong, Yuseong-Gu, Daejeon, Rep. of Korea.
Optics Express
|January 7, 2010
Abstract:
On-chip, planar integration of Er-doped Silicon-rich silicon nitride microdisks with SU-8 waveguide and polymer cladding is achieved. The lack of high temperature or etching processes allows back-end integration without any optical damage to the microcavity resonator. The maximum measured Q-factor at 1475.5 nm was 13,000, corresponding to calculated intrinsic resonator Q-factor of 25,000 that is limited by process-related roughness.
