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Updated: Jun 16, 2026

Multimodal Nonlinear Hyperspectral Chemical Imaging Using Line-Scanning Vibrational Sum-Frequency Generation Microscopy
Published on: December 1, 2023
Dual channel heterodyne microscope
1Samsung Electronics, Mechatronics Center, 416, Maetan-3Dong, Yeongtong-Gu, Suwon-City, Gyeonggi-Do 442-600, South Korea. proto.vladimir@samsung.com
Abstract:
Heterodyne measurement of the amplitude and phase of a cross-polarized two-frequency laser beam reflected from a patterned surface enables simultaneous imaging in both the amplitude and phase-contrast modes. Such imaging duality provides additional information for inspection. Besides, spatial resolution in the phase-contrast mode of operation is not limited by the width of the focused beam and, therefore, may be better than that of traditional imaging techniques. This phenomenon, commonly referred to as super-resolution, was experimentally observed.
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