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Is keV ion-induced pattern formation on Si(001) caused by metal impurities?

Sven Macko1, Frank Frost, Bashkim Ziberi

  • 1II. Physikalisches Institut, Universität zu Köln, Zülpicher Strasse 77, D-50937 Cologne, Germany.

Nanotechnology
|January 26, 2010
PubMed

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