Updated: Jun 16, 2026

Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
Published on: January 19, 2020
Ju-Hyun Kim1, Gyumin Kang, Yoonkey Nam
1Nano-Oriented Bio-Electronics Lab, Department of Electrical Engineering, College of Information Science & Technology, KAIST, Daejeon 305-701, Korea.
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