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Updated: Jun 15, 2026

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Published on: July 17, 2015
The third generation superconducting 28 GHz electron cyclotron resonance ion source VENUS (invited)
C Lyneis1, D Leitner, M Leitner
1Lawrence Berkeley National Laboratory, One Cyclotron Road, Berkeley, California 94720, USA. cmlyneis@lbl.gov
Abstract:
VENUS is a third generation electron cyclotron resonance (ECR) ion source, which incorporates a high field superconducting NbTi magnet structure, a 28 GHz gryotron microwave source and a state of the art closed cycle cryosystem. During the decade from initial concept to regular operation, it has demonstrated both the feasibility and the performance levels of this new generation of ECR ion sources and required innovation on magnet construction, plasma chamber design, and beam transport. In this paper, the development, performance, and major innovations are described as well as a look to the potential to construct a fourth generation ECR ion source.
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