Metal-dielectric structures for high power electron cyclotron resonance ion source

K E Stiebing1, L Schachter, S Dobrescu

  • 1Institut für Kernphysik, J. W. Goethe-Universität, Frankfurt/Main, Germany. stiebing@em.uni-frankfurt.de

Summary

Metal-dielectric structures enhance electron cyclotron resonance ion source performance by improving plasma properties and reducing heat load. Experiments at high microwave powers confirm their effectiveness for high-performance ion sources.