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Broad-beam high-current dc ion source based on a two-stage glow discharge plasma
A V Vizir1, E M Oks, G Yu Yushkov
1High Current Electronics Institute, Siberian Division of the Russian Academy Sciences, Tomsk 634055, Russia.
The Review of Scientific Instruments
|March 3, 2010
Summary
A novel two-stage, hollow-cathode, glow discharge ion source achieves low pressure and voltage operation. This results in high-purity ion beams with significant diameter and current for various applications.
Area of Science:
- Plasma Physics
- Ion Source Technology
- Materials Science
Background:
- Conventional ion sources often require high operating pressures and voltages.
- High operating parameters can lead to increased impurity ions in the extracted beam.
- Efficient electron injection is crucial for optimizing plasma discharge conditions.
Purpose of the Study:
- To design and demonstrate a novel broad-beam, DC ion source.
- To reduce operating pressure and voltage requirements for ion generation.
- To improve the purity of extracted ion beams.
Main Methods:
- Utilized a two-stage discharge system: auxiliary glow discharge for electron production and main hollow-cathode discharge.
- Employed electron injection from the auxiliary to the main discharge.
- Implemented a single-grid accelerating system with voltage applied between plasma and grid.
Main Results:
- Achieved stable operation at low pressures (0.05 mTorr) and low voltages (approx. 50 V) for the main discharge.
- Reduced impurity ion fraction in the extracted beam to less than 0.2%.
- Produced steady-state Argon, Oxygen, and Nitrogen ion beams (14 cm diameter, >2 A current) at up to 2 kV acceleration.
Conclusions:
- The developed two-stage hollow-cathode ion source effectively lowers operating parameters.
- The source yields high-purity ion beams suitable for demanding applications.
- This design offers a promising alternative for broad-beam ion generation.
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