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    Area of Science:

    • Optical physics
    • Metrology

    Background:

    • Ellipsometry relies on precise component alignment for accurate measurements.
    • Interactions between adjustable components, known as coupling, can introduce errors during the nulling process.

    Purpose of the Study:

    • To introduce a practical criterion for assessing component coupling in ellipsometry.
    • To analyze the impact of coupling and detector sensitivity on setting uncertainty.
    • To guide the selection of optimal nulling schemes.

    Main Methods:

    • Development of a coupling criterion applicable to generalized and conventional ellipsometry.
    • Application of the criterion to established ellipsometric scenarios.
    • Investigation of the relationship between coupling, detector sensitivity, and component setting uncertainty.

    Main Results:

    • A novel, practical criterion for quantifying ellipsometer component coupling has been established.
    • The study quantifies the influence of coupling and detector sensitivity on the precision of component adjustments.
    • The findings provide a basis for selecting more effective nulling strategies.

    Conclusions:

    • The proposed coupling criterion offers a valuable tool for ellipsometer calibration and performance optimization.
    • Understanding and mitigating coupling effects are crucial for minimizing setting uncertainty.
    • Informed nulling scheme selection enhances the reliability of ellipsometric measurements.