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Updated: Jun 15, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Kai Liu1, Yongchang Wang, Daniel L Lau
1Electrical and Computer Engineering, University of Kentucky, Lexington, Kentucky 40506, USA. kai.liu@uky.edu
This study introduces a mathematical model and calibration method to reduce errors in 3D reconstructions from phase measuring profilometry (PMP) caused by optical gamma distortion, improving accuracy in real-time applications.
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