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Updated: Jun 14, 2026

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Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Calibration issues for nanoindentation experiments: direct atomic force microscopy measurements and indirect methods.
A C Barone1, M Salerno, N Patra
1Nanophysics, Italian Institute of Technology, Via Morego 30, Genoa, Italy. alberto.barone@iit.it
Microscopy Research and Technique
|March 23, 2010
Summary
Accurate nanoindentation requires precise calibration of the diamond area function (DAF). This study compares direct atomic force microscopy (AFM) measurements with a novel indirect method for improved DAF calibration.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Science
Background:
- Accurate measurement of the diamond area function (DAF) is critical for shallow depth nanoindentation experiments.
- Existing calibration methods may introduce inaccuracies, particularly at shallow depths.
- Berkovich tips are commonly used in nanoindentation, necessitating reliable calibration.
Purpose of the Study:
- To address calibration issues in shallow depth nanoindentation with Berkovich tips.
- To compare the accuracy of direct DAF measurement via AFM with a novel indirect calibration method.
- To evaluate the sensitivity and convergence of indirect calibration procedures.
Main Methods:
- Direct measurement of the DAF using atomic force microscopy (AFM) imaging of the Berkovich tip at shallow depths.
- A novel indirect calibration method utilizing an iterative scheme to simultaneously determine reduced modulus and indentation hardness.
- Indentation measurements on fused silica across a 0.5-200 mN load range using a Berkovich indenter.
Main Results:
- Comparison of direct AFM-based DAF measurement with the novel indirect calibration method.
- Evaluation of the novel indirect method's performance against standard indirect calibration procedures.
- Sensitivity and convergence studies performed for both indirect calibration approaches.
Conclusions:
- The study provides a comparative analysis of different calibration strategies for nanoindentation.
- The novel indirect method offers a robust alternative for accurate DAF determination.
- Findings contribute to improving the reliability of mechanical property measurements at the nanoscale.

