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Updated: Jun 14, 2026

Cooling Rate Dependent Ellipsometry Measurements to Determine the Dynamics of Thin Glassy Films
09:32

Cooling Rate Dependent Ellipsometry Measurements to Determine the Dynamics of Thin Glassy Films

Published on: January 26, 2016

Parameter correlation and precision in multiple-angle ellipsometry.

G H Bu-Abbud, N M Bashara

    Applied Optics
    |March 25, 2010
    PubMed
    Summary
    This summary is machine-generated.

    A new method using multiple-angle-of-incidence ellipsometry precisely characterizes optical parameters of surfaces. This technique improves precision by minimizing parameter correlation, enabling accurate determination of material properties like refractive index and thickness.

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    Area of Science:

    • Materials Science
    • Optical Physics
    • Surface Science

    Background:

    • Accurate characterization of optical parameters is crucial for material analysis.
    • Ellipsometry is a powerful technique for thin film analysis, but precision can be limited by parameter correlations.

    Purpose of the Study:

    • Develop a general procedure for optical parameter characterization using multiple-angle-of-incidence ellipsometry.
    • Quantitatively evaluate the precision of estimated parameters and identify factors influencing it.

    Main Methods:

    • Developed a fixed wavelength multiple-angle-of-incidence ellipsometry procedure.
    • Analyzed parameter precision using least squares fit error, parameter cross-correlation, and variance-covariance relations.
    • Utilized a silicon dioxide-silicon substrate system for experimental validation.

    Main Results:

    • Demonstrated that lower parameter correlation improves precision when using a correct system model.
    • Achieved high precision in determining the complex refractive index of silicon and the extinction coefficient of silicon dioxide.
    • Estimated oxide refractive index and thickness with reasonable confidence, despite observed cross-correlation.

    Conclusions:

    • The developed multiple-angle-of-incidence ellipsometry procedure offers a robust method for optical parameter characterization.
    • Minimizing parameter correlation is key to enhancing measurement precision.
    • The method successfully determined optical properties of the silicon dioxide-silicon system, highlighting its practical applicability.