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Layered synthetic microstructures as Bragg diffractors for X rays and extreme ultraviolet: theory and predicted
Applied Optics
|March 25, 2010
Summary
Layered synthetic microstructures (LSMs) enable efficient Bragg diffraction for X-rays and extreme ultraviolet (EUV) radiation. Their properties can be tailored for specific applications by adjusting layer properties, with theory accounting for imperfections.
Area of Science:
- Materials Science
- Optics
- Physics
Background:
- Thin film technology advancements enable novel multilayered structures.
- Layered Synthetic Microstructures (LSMs) function as Bragg diffractors for X-ray and EUV radiation.
- These structures are analogous to visible light interference filters with broad instrumentation potential.
Purpose of the Study:
- To apply X-ray diffraction theory to LSMs.
- To present approximate formulas for estimating LSM performance.
- To describe a computation scheme for tailoring LSM diffracting properties.
Main Methods:
- Application of X-ray diffraction theory to periodic structures.
- Development of approximate performance estimation formulas.
- Utilization of optical multilayer theory for a detailed computation scheme.
- Modification of theory to include structural imperfections and nonperiodic structures.
Main Results:
- Approximate formulas for LSM performance estimation were derived.
- A computation scheme based on optical multilayer theory was described.
- The ability to tailor diffracting properties by adjusting layer refractive indices and thicknesses was demonstrated.
- Theoretical modifications for accounting for LSM imperfections and nonperiodic structures were presented.
Conclusions:
- LSMs offer efficient Bragg diffraction for X-ray and EUV radiation.
- The diffracting properties of LSMs can be precisely controlled for specific applications.
- The presented theoretical framework accounts for structural imperfections, enhancing LSM design and application.
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