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A Soft X-Ray/EUV Reflectometer Based on a Laser Produced Plasma Source

E M Gullikson1, J H Underwood, P C Batson

  • 1Center for X-Ray Optics, Materials Sciences Division, Lawrence Berkeley Laboratory, Berkeley, California 94720.

Journal of X-Ray Science and Technology
|February 11, 2011
PubMed

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Atomic emission spectroscopy (AES) is an analytical technique used to determine the elemental composition of a sample by analyzing the light emitted from excited atoms. In AES, atoms in a sample are excited to higher energy levels by thermal energy from high-temperature sources, such as plasma, arcs, or sparks. When these excited atoms return to lower energy states, they emit light at specific wavelengths characteristic of each element. The resulting atomic emission spectrum, which consists of...
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Inductively coupled plasma (ICP) is the most widely used plasma source in atomic emission spectroscopy (AES), also known as Inductively Coupled Plasma Optical Emission Spectroscopy (ICP-OES). The ICP source, or torch, consists of three concentric quartz tubes with argon gas flowing through them. A spark from a Tesla coil initiates the ionization of argon, generating a high-temperature plasma.
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