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Published on: January 3, 2016
Detection method of nonlinearity errors by statistical signal analysis in heterodyne Michelson interferometer
Juju Hu1, Haijiang Hu, Yinghua Ji
1School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai, 200093, China.
This study introduces a new method to detect nonlinearity errors in heterodyne interferometers. The technique uses electrical subdivision and statistical signal analysis for accurate high-precision measurements.
Area of Science:
- Metrology
- Optical Interferometry
Background:
- Periodic nonlinearity in heterodyne interferometers, ranging from nanometers to a few nanometers, restricts high-accuracy measurements.
- Existing methods struggle to precisely quantify these nonlinearity errors.
Purpose of the Study:
- To develop and study a novel method for detecting nonlinearity errors in heterodyne Michelson interferometers.
- To improve the accuracy of dimensional measurements by addressing nonlinearity issues.
Main Methods:
- Utilizing electrical subdivision and statistical signal analysis.
- Applying regression analysis and Jackknife estimation under uniform velocity conditions.
- Simulating the detection and estimation of nonlinearity errors and other noise influences.
Main Results:
- The proposed method effectively detects nonlinearity errors in heterodyne interferometers.
- Simulations demonstrate the capability to estimate the impact of nonlinearity and noise on dimensional measurements.
- The technique shows potential for enhancing measurement precision.
Conclusions:
- The novel method offers a viable solution for identifying and quantifying nonlinearity errors in heterodyne Michelson interferometers.
- This approach contributes to achieving higher accuracy in precision metrology.
- Further validation through experimental studies is recommended.
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