Widely tunable microwave phase shifter based on silicon-on-insulator dual-microring resonator

We propose and demonstrate tunable microwave phase shifters based on electrically tunable silicon-on-insulator microring resonators. The phase-shifting range and the RF-power variation are analyzed. A maximum phase-shifting range of 0-600 degrees is achieved by utilizing a dual-microring resonator. A quasi-linear phase shift of 360 degrees with RF-power variation lower than 2dB and a continuous 270 degrees phase shift without RF-power variation at a microwave frequency of 40GHz are also demonstrated.