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Optimization of EFTEM image acquisition by using elastically filtered images for drift correction
1Physikalisches Institut and Interdisziplinäres Centrum für Elektronenmikroskopie und Mikroanalyse (ICEM), Universität Münster, Wilhelm-Klemm-Str. 10, 48149 Münster, Germany. tobiheil@uni-muenster.de
Ultramicroscopy
|April 16, 2010
Summary
This study introduces a new method for energy-filtering transmission electron microscopy (EFTEM) to improve image quality. By merging multiple short-exposure images and correcting for drift, sharper nanostructure analysis is achieved.
Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- Energy-filtering transmission electron microscopy (EFTEM) is crucial for nanostructure chemical analysis due to its high spatial resolution.
- Optimizing data acquisition and correcting instrumental influences are vital for achieving the best spatial resolution in EFTEM.
Purpose of the Study:
- To present a modified image acquisition procedure for EFTEM that enhances image quality, particularly for long exposures and high spatial drift.
- To improve the accuracy and clarity of elemental mapping in nanostructures.
Main Methods:
- A novel approach involves acquiring multiple short-exposure EFTEM sub-images and merging them.
- Elastically filtered images are acquired between sub-images for precise spatial drift correction using cross-correlation.
- Dark reference images are calculated from three images to suppress noise-peak artifacts.
Main Results:
- The proposed method effectively alleviates image blurring caused by spatial drift, resulting in sharper edges and improved signal intensity.
- Drift-corrected sub-images are merged automatically with high accuracy.
- Noise-peak artifacts in dark reference images are significantly suppressed.
Conclusions:
- The modified acquisition procedure optimizes EFTEM imaging for challenging conditions like long exposure times and spatial drift.
- This technique simplifies post-processing for elemental mapping and enables active drift correction, potentially increasing the field of view.
