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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Enhanced sensitivity volatile detection with low power integrated micromechanical resonators.
Devrez M Karabacak1, Sywert H Brongersma, Mercedes Crego-Calama
1Holst Centre/IMEC, High Tech Campus 31, 5656 AE Eindhoven, The Netherlands. devrez.karabacak@imec-nl.nl
Lab on a Chip
|May 21, 2010
Summary
This study demonstrates high aspect ratio micro-resonators for sensitive volatile compound detection. Polymer-coated beams detect low-molecular weight analytes at parts-per-million levels via swelling-induced stress.
Area of Science:
- Materials Science
- Chemical Sensing
- Microelectromechanical Systems (MEMS)
Background:
- Micro-resonators offer high sensitivity for chemical sensing applications.
- Achieving low power consumption and high yield in resonator arrays remains a challenge.
Purpose of the Study:
- To demonstrate a novel design for high aspect ratio micro-resonators for volatile sensing.
- To investigate the sensitivity enhancement mechanism in polymer-coated resonators.
Main Methods:
- Fabrication of doubly clamped beams with high aspect ratios and integrated piezoelectric transducers.
- Functionalization of resonators with polymer coatings for selective analyte absorption.
- Characterization of resonator response to volatile compounds at ppm concentrations.
Main Results:
- High yield fabrication of dense, individually functionalizable suspended resonator arrays.
- Detection of low-molecular weight analytes at ppm-level concentrations.
- Quantification of sensitivity enhancement attributed to polymer swelling and axial stress.
Conclusions:
- High aspect ratio micro-resonators with piezoelectric transducers are effective for low-power volatile sensing.
- Polymer coating significantly enhances sensitivity through stress-mediated mechanisms.
- The demonstrated approach enables sensitive detection of volatile organic compounds.
