You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Jun 12, 2026

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)
Published on: June 17, 2017
Corinne E Packard1, Apoorva Murarka, Eric W Lam
1Electrical Engineering and Computer Science Department, Massachusetts Institute of Technology, Cambridge, MA, USA.
No abstract available in PubMed .