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Updated: Jun 12, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Multichannel phase-stepped holographic interferometry
Abstract:
A modified holographic interferometer is described which enables automatic fringe pattern analysis to be achieved when recording transient events. The introduction of a phase grating enables the method of phasestepping fringe analysis to be applied to a wide range of measurement problems. The theory is developed, and an analysis of the sources of error is presented with the aid of computer simulations. Initial experimental results confirm the utility of the method and its potential application in pulsed laser holography. The method can in principle be applied to electronic speckle pattern interferometry.
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