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Updated: Jun 12, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
10:28

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

Comments on the error analysis and adjustment of multichannel phase-stepped holographic interferometers

M Kujawinska, D W Robinson

    Applied Optics
    |June 16, 2010
    PubMed

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