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The development of a new windowless XEDS detector.

Shigeto Isakozawa¹, Kazutoshi Kaji, Keiji Tamura

¹Hitachi High Technologies Corp., 882 Ichige, Hitachinaka, Ibaraki 312-8504, Japan. isakozawa-shigeto@naka.hitachi-hitec.com

Journal of Electron Microscopy

|June 10, 2010

Summary

A novel windowless X-ray energy-dispersive spectroscopy (XEDS) detector for analytical electron microscopy (AEM) significantly enhances X-ray detection sensitivity. This advancement improves the detection of light elements like nitrogen, crucial for materials analysis.

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Area of Science:

Materials Science
Analytical Chemistry
Physics

Background:

Conventional X-ray energy-dispersive spectroscopy (XEDS) detectors in analytical electron microscopes (AEM) suffer from low X-ray detection sensitivity.
Ultra-thin windows (UTW) and vacuum gate valves in traditional detectors impede sensitivity and cause vibrations.

Purpose of the Study:

To develop and evaluate a new windowless XEDS detector for AEM.
To overcome the limitations of conventional XEDS detectors regarding sensitivity and vibration.

Main Methods:

Development of a novel windowless XEDS detector for AEM.
Performance evaluation of the detector at a vacuum level of 10⁻⁵ Pa.
Comparison of X-ray detectability with conventional UTW detectors.

Main Results:

The windowless XEDS detector demonstrated considerably improved X-ray detectability.
Sensitivity for detecting nitrogen characteristic X-ray signals was three times higher compared to conventional UTW detectors.
Elimination of UTW and vacuum gate valve resolved major sensitivity and vibration issues.

Conclusions:

The new windowless XEDS detector offers superior performance for AEM.
This technology enhances the detection of light elements, advancing materials characterization.
The design provides a significant improvement for analytical electron microscopy applications.