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Quantitative Optical Microscopy: Measurement of Cellular Biophysical Features with a Standard Optical Microscope

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Differential amplitude scanning optical microscope: theory and applications.

C W See, M Vaez-Iravani

|June 10, 2010

Summary

A novel differential amplitude scanning optical microscope achieves high sensitivity, detecting reflectivity variations down to 3x10^-7. This advanced optical microscopy technique excels in precise linewidth measurements, outperforming other methods.

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Area of Science:

Optical Microscopy
Surface Metrology
Materials Science

Background:

Traditional optical microscopes face limitations in detecting subtle surface variations.
Accurate measurement of microscale features is crucial in materials science and semiconductor manufacturing.

Purpose of the Study:

To introduce and characterize a differential amplitude scanning optical microscope (DASOM).
To demonstrate the DASOM's capability for high-sensitivity reflectivity measurements and accurate linewidth determination.

Main Methods:

The DASOM operates by sinusoidally interrogating the sample with a focused optical beam.
Image formation is achieved by analyzing the amplitude variations resulting from beam movement across the sample surface.
The system's performance is evaluated through experimental applications.

Main Results:

The microscope detects reflectivity variations as small as 3 x 10^-7 within a 10-Hz bandwidth.
Successful imaging of metal grain structures, polished diamond surfaces, and doped silicon wafers.
Demonstrated high accuracy in linewidth measurements, with limitations stemming from scan coordinate precision.

Conclusions:

The differential amplitude scanning optical microscope offers superior sensitivity for surface analysis.
The DASOM is a powerful tool for metrology, particularly for accurate linewidth measurements.
Scan coordinate accuracy is the primary factor limiting precision in linewidth measurements with this system.