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Related Experiment Video

Updated: Jun 12, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
05:57

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Integrated optical interferometer with a stacked waveguide structure.

S Wu, H J Frankena

    Applied Optics
    |June 18, 2010
    PubMed
    Summary
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    This study presents an integrated optical interferometer using aluminum oxide waveguides on a silicon substrate. The device demonstrates effective temperature sensing and discusses potential for humidity measurement.

    Area of Science:

    • Optoelectronics
    • Integrated Optics
    • Nanofabrication

    Background:

    • Optical interferometers are crucial for precise measurements.
    • Developing compact and integrated optical devices is an ongoing challenge.
    • Alumina (Al2O3) and silica (SiO2) are suitable materials for integrated optical waveguides.

    Purpose of the Study:

    • To present an integrated optical interferometer design.
    • To demonstrate a novel fabrication method for directional couplers.
    • To explore the sensing capabilities of the device for temperature and humidity.

    Main Methods:

    • Fabrication of stacked Al2O3 waveguides on a SiO2/Si substrate.
    • Utilizing a masked evaporation technique for directional coupler formation.

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    Last Updated: Jun 12, 2026

    Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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    Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

    Published on: April 1, 2020

    Implementation of a Reference Interferometer for Nanodetection
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    Implementation of a Reference Interferometer for Nanodetection

    Published on: April 26, 2014

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  • Characterization of the interferometer's performance through temperature-sensing experiments.

    • Main Results:

    • Successful integration of stacked Al2O3 waveguides.
    • Demonstration of functional directional couplers fabricated via masked evaporation.
    • Confirmation of the interferometer's operational capability in temperature sensing.

    Conclusions:

    • The presented integrated optical interferometer is a viable platform for sensing applications.
    • The masked evaporation technique offers a practical approach for fabricating directional couplers.
    • The device shows promise for future development in environmental monitoring, including humidity sensing.