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Updated: Jun 11, 2026
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Measurement and modeling of 2D hexagonal resonant-grating filter performance
A-L Fehrembach1, O Gauthier-Lafaye, K Chan Shin Yu
1Institut Fresnel, CNRS, Aix-Marseille Université, Ecole Centrale Marseille, Campus de St-Jérôme,13013 Marseille, France.
Summary
We developed a polarization-independent guided-mode resonant filter with a high Q factor of 2200 for near-infrared applications. Further improvements in lithography can enhance performance in future guided-mode resonant filter designs.
Area of Science:
- Optics and Photonics
- Nanophotonics
- Integrated Optics
Background:
- Guided-mode resonant filters (GMRFs) are crucial optical components.
- Achieving high Q factors and polarization independence is a key challenge.
- Near-infrared (NIR) applications require efficient and compact optical filters.
Purpose of the Study:
- To report the measurement of a novel polarization-independent GMRF.
- To characterize the optical and structural properties of the GMRF.
- To identify limitations and suggest improvements for future GMRF designs.
Main Methods:
- Fabrication of a guided-mode resonant filter.
- Optical characterization near normal incidence in the near-infrared (850 nm).
- Detailed structural analysis to understand performance limitations.
Main Results:
- A polarization-independent GMRF was successfully measured.
- The filter exhibited a high Q factor of approximately 2200.
- Optical and structural characterization identified key factors limiting experimental performance.
Conclusions:
- The demonstrated GMRF shows remarkable performance for NIR applications.
- Experimental limitations are attributed to fabrication imperfections.
- Improving the lithography process is expected to yield even higher performance in future devices.
