Related Experiment Video
Updated: Jun 10, 2026
Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System
Published on: July 18, 2015
Atomic layer deposited titanium dioxide and its application in resonant waveguide grating
T Alasaarela1, T Saastamoinen, J Hiltunen
1Department of Micro and Nanosciences, Aalto University School of Scienceand Technology, Micronova, PO Box 13500, FI-00076 Aalto, Finland. tapani.alasaarela@tkk.fi
Abstract:
We demonstrate good optical quality TiO(2) thin films grown by atomic layer deposition at 120 degrees C. The optical properties were studied using spectroscopic ellipsometry and prism coupling methods. The refractive index was 2.27, and the slab waveguide propagation loss was less than 1dB/cm at 1.53microm. A high quality resonant waveguide grating was fabricated using a thin TiO(2) layer on top of a SiO(2) grating.
