Micromachined lens microstages for two-dimensional forward optical scanning.

Area of Science:

• Optoelectronics
• Micro-Electro-Mechanical Systems (MEMS)

Background:

• Miniaturization of optical systems is crucial for advanced imaging and projection devices.
• Existing scanning modules often face limitations in size, power consumption, and performance.

Purpose of the Study:

• To develop a novel, miniaturized optical scanning module utilizing MEMS actuation.
• To enable precise lateral and piston motion of lenses for optical path tilting.

Main Methods:

• Assembly of two 1 mm diameter aspheric glass lenses on electrostatically actuated microstages.
• Implementation of perpendicular axes for lateral and piston lens motion.
• Utilizing MEMS actuation for controlled lens movement.

Main Results:

• Achieved compact integration with a 0.6 mm effective beam aperture within a 2 mm device width.
• Demonstrated high-Q motions at low operating voltages (DC 5 V, AC 10 V).
• Obtained a lateral scan angle of 4.6 degrees at 277 Hz and a vertical scan angle of 5.3 degrees at 204 Hz.

Conclusions:

• The developed module offers a new direction for miniaturizing laser scanning systems.
• Potential applications include advanced laser scanning based endoscopes and handheld projectors.
• The MEMS-actuated approach provides a compact and efficient solution for optical scanning.