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Updated: Jun 10, 2026
07:51
Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Ultra-low voltage, ultra-small mode volume silicon microring modulator
Sasikanth Manipatruni1, Kyle Preston, Long Chen
1School of Electrical and Computer Engineering, Cornell University, Ithaca, New York 14853, USA.
Optics Express
|August 20, 2010
Summary
Researchers demonstrated GHz modulation using a tiny silicon micro-ring modulator. This breakthrough enables high-speed, low-voltage optical modulation for seamless integration with nano-electronics.
Area of Science:
- Photonics and optoelectronics
- Nanotechnology
- Integrated circuits
Background:
- Silicon micro-ring resonators are key components in photonic integrated circuits.
- Achieving high-speed modulation with low drive voltage is crucial for energy-efficient optical communication.
Purpose of the Study:
- To demonstrate a novel silicon micro-ring modulator with unprecedented performance.
- To explore the potential for integrating nanophotonics with low-voltage CMOS nano-electronics.
Main Methods:
- Fabrication of a 2.5 micrometer radius silicon micro-ring resonator.
- Characterization of modulation performance at GHz frequencies.
- Measurement of electro-optic modal volume and drive voltage.
Main Results:
- Achieved GHz modulation with a record low 150 mV peak-peak drive voltage.
- Demonstrated the smallest silicon micro-ring modulator and swing voltage to date.
- Obtained an electro-optic modal volume of only 2 cubic micrometers.
Conclusions:
- The developed silicon micro-ring modulator represents a significant advancement in high-speed, low-voltage optical modulation.
- This technology paves the way for a new generation of energy-efficient nanophotonic devices.
- Enables seamless integration of nanophotonics with low-voltage digital CMOS nano-electronics.
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